Si₃N₄ vs AlN vs Al₂O₃: Choosing a Power-Module Substrate

As SiC devices push power densities and junction temperatures higher, the substrate — not the chip — is often the weak link. Here is how the three common ceramics compare.

PropertyAl₂O₃ (Alumina)AlNSi₃N₄
Bending strength (MPa)~300~300≥ 600
Thermal conductivity (W/m·K)~24~170≥ 80
Thermal expansion (×10⁻⁶/K)~7.2~4.5~3.0
Thermal-cycle reliabilityFairGoodExcellent
Best forCost-sensitiveMax heat removalHarsh cycling

What matters in an EV inverter

In a vehicle, the power module sees thousands of thermal cycles per year. Al₂O₃ is cheap but cracks; AlN conducts heat best but is brittle and shocks easily; Si₃N₄ trades some peak conductivity for far higher strength and the best resistance to thermal cycling — which is why AMB (active metal brazed) Si₃N₄ substrates are now the mainstream choice for 800 V SiC traction inverters.

When to pick AlN instead

If your bottleneck is pure heat flux (e.g. high-current industrial converters with stable mounting), AlN's ~170 W/m·K still wins on conduction. Choose Si₃N₄ when mechanical shock, vibration and cycling dominate.

FAQ

Is Si₃N₄ substrate better than AlN?

For automotive and rugged power modules, yes — Si₃N₄ survives more thermal cycles due to higher strength and lower thermal expansion mismatch with the SiC chip. AlN wins only on raw thermal conductivity.

What is AMB?

Active Metal Brazing: a titanium-containing braze bonds copper directly to the ceramic, giving high-current, high-reliability substrates used in SiC modules.

See our Si₃N₄ substrates →